T/CIRA 24-2021 False sealing source helium mass spectrometry leak detection procedure

Scope

Scope: This document specifies the instruments and equipment, test requirements, test methods, leak detection procedures, and test reports for helium mass spectrometry leak detection of false sealed sources. This document is applicable to the helium mass spectrometry backpressure leak detection of false sealed source products with an actual standard helium leak rate of less than 1.4×10-5 Pa·m3/s. Other similar sealed devices can refer to this standard for implementation. Main technical content: This standard is mainly divided into two parts: the main body and the appendix. The main body includes: scope, normative reference documents, terms and definitions, instruments and equipment, test requirements, test methods, leak detection procedures, and test reports. The appendix includes: the principle of the method; an example of the relationship between the measured leak rate R and the actual standard helium leak rate L.

Development Information

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