T/SHXCL 0004-2021 Active Group standards

T/SHXCL 0004-2021 Non-woven fabric/polyurethane composite polishing pad

Publish Date: 2021-04-12 Implement Date: 2021-05-30 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/SHXCL 0004-2021

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Basis standards and general methods for pesticides

ICS Name: Other composite reinforcement materials

Publish Date: 2021-04-12

Implement Date: 2021-05-30

Scope

Main technical content: This document specifies the classification, requirements, test methods, inspection rules, and marking, packaging, transportation, and storage of non-woven/polyurethane composite polishing pads (hereinafter referred to as polishing pads). This document is applicable to polishing pads used for polishing materials such as silicon wafers, LCD substrates, and glass panels, as well as sapphire substrates. It can also be applied to the polishing of ITO conductive glass, glass substrates, photomasks, and LCD masks, beryllium, fused quartz, indium phosphide, lithium niobate, lithium tantalate, stainless steel, tungsten, and expansion glass.