YS/T 1124-2016 Active Industry standards-Non-ferrous metals

YS/T 1124-2016 Testing method on pass through flux of magnetic sputtering target

Publish Date: 2016-07-11 Implement Date: 2017-01-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 1124-2016

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: \nTest methods for the physical properties of metals

ICS Name: Other non-ferrous metals and their alloys

Publish Date: 2016-07-11

Implement Date: 2017-01-01

Pages: 5 pages

Scope

This standard specifies the terms and definitions of magnetic permeability for magnetic targets used in magnetron sputtering, as well as the inspection equipment, inspection process, and calculation of inspection results.
This standard is applicable to the inspection of magnetic permeability for all types of magnetic targets used in sputtering thin films.