GB/T 16527-1996 Active National standards

GB/T 16527-1996 Specification for photoresist/E-beam resist for hard surface photoplates

Publish Date: 1996-09-09 Implement Date: 1997-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 16527-1996

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic devices and specialized materials, parts, and structural components

ICS Name: Integrated circuits, microelectronics

Publish Date: 1996-09-09

Implement Date: 1997-05-01

Pages: 12 pages

Development Information

Word Count: 10 Thousand words Pages: 12 pages

Referenced Standards

GB 191-90 GB 2828-87 GB 2829-87 GB 7238-87 GB 7239-87 GB/T 15871-1995 Hard surface photomask substrates GB/T 15870-1995 Chrome thin films for hard surface photomasks SJ/T 10584-94

Adopt standards

SEMI P3-90

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