GB/T 29557-2013 Active National standards

GB/T 29557-2013 Surface chemical analysis—Depth Profiling—Measurment of sputtered depth

Publish Date: 2013-07-19 Implement Date: 2014-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 29557-2013

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2013-07-19

Implement Date: 2014-03-01

Pages: 15 pages

Scope

This standard specifies the criteria for measuring the sputtering depth in sputtering depth profiling.
This standard is applicable to surface chemical analysis techniques that combine ion bombardment to remove parts of solid samples, with the sputtering depth typically reaching several micrometers.