GB 4962-1985
Replaced
T/CPCIF 0334-2024
Active
Group standards
T/CPCIF 0334-2024 Electronic industry gas: Fluorine-nitrogen mixed gas
T/CPCIF 0334-2024 Electronic industry gas: Fluorine-nitrogen mixed gas
Price:
$ 20.00
Basic Information
Standard Code:
T/CPCIF 0334-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Chemical industry
ICS Name:
Industrial gases
Publish Date:
2024-03-01
Implement Date:
2024-06-01
Scope
Scope: This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage for fluorine-nitrogen mixtures used in the electronics industry. This document applies to fluorine obtained by electrolytic dehydrated hydrogen fluoride and purified through a purification process, which is mixed with nitrogen to form fluorine-nitrogen mixtures used in the electronics industry. Main technical content: Project fluorine (F2) content (volume fraction) / 10-2 nitrogen (N2) content (volume fraction) / 10-2 oxygen (O2) content (volume fraction) / 10-6 carbon tetrafluoride (CF4) content (volume fraction) / 10-6 sulfur hexafluoride (SF6) content (volume fraction) / 10-6 carbon monoxide (CO) content (volume fraction) / 10-6 carbon dioxide (CO2) content (volume fraction) / 10-6 hydrogen fluoride (HF) content (volume fraction) / 10-6
Development Information
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced