GB/T 3143-1982
Active
GB/T 33236-2016
Active
National standards
GB/T 33236-2016 Polycrystalline silicon—Determination of trace elements—Glow discharge mass spectrometry method
GB/T 33236-2016 Polycrystalline silicon—Determination of trace elements—Glow discharge mass spectrometry method
Basic Information
Standard Code:
GB/T 33236-2016
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Basic standards and general methods
ICS Name:
Chemical analysis
Publish Date:
2016-12-13
Implement Date:
2017-11-01
Pages:
12 pages
Scope
This standard specifies the test method for measuring impurity elements in polycrystalline silicon using the glow discharge mass spectrometry (GDMS) method. This standard is applicable to the determination of the content of impurity elements in polycrystalline silicon materials, except for hydrogen and inert gas elements. The measurement range is from the detection limit of this method to 0.1% (mass fraction), and the detection limit is determined according to the instrument used and the measurement conditions. By correcting with appropriate standard samples, the content of impurity elements with a mass fraction greater than 0.1% can also be measured. Trace impurity elements in monocrystalline silicon materials can also be measured in accordance with this standard.
Development Information
Referenced Standards
Related Standards
GB/T 4472-1984
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GB/T 4472-1984 General rule for determination of density and relative density for chemical products
GB/T 4946-1985
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GB/T 4946-1985 Terms of gas chromatography
GB/T 5274-1985
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GB/T 5274-1985 Gas analysis—Preparation of calibration gas mixtures—Weighing methods
GB/T 5831-1986
Replaced
GB/T 5831-1986 Determination of trace oxygen in the gases—Colorimetric method
GB/T 5832.2-1986
Replaced