GB 4962-1985
Replaced
T/CHBAS 42-2023
Active
Group standards
T/CHBAS 42-2023 Phosphine gas mixture used in the electronics industry
T/CHBAS 42-2023 Phosphine gas mixture used in the electronics industry
Price:
$ 20.00
Basic Information
Standard Code:
T/CHBAS 42-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Industrial gases
Publish Date:
2023-12-22
Implement Date:
2023-12-30
Scope
Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage, and safety of phosphine gas mixtures used in the electronics industry (hereinafter referred to as phosphine gas mixtures). This document is applicable to phosphine gas mixtures used in the electronics industry, which are mainly used as doping sources for epitaxy processes, diffusion sources for diffusion processes, and ion implantation sources. The balance gas in phosphine gas mixtures is usually helium, argon, nitrogen, and hydrogen, but it can also be other gases that do not chemically react with phosphine and do not affect the reaction process.
Development Information
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced