GB/T 25755-2010 Active National standards

GB/T 25755-2010 Vacuum technology—Sputter-ion pumps—Measurement of performance characteristics

Publish Date: 2010-12-23 Implement Date: 2011-10-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 25755-2010

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Vacuum technology and equipment

ICS Name: Vacuum technology

Publish Date: 2010-12-23

Implement Date: 2011-10-01

Pages: 11 pages

Scope

This standard specifies the measurement methods for the performance parameters of sputter ion pumps (hereinafter referred to as ion pumps).
This standard applies to ion pumps with a nominal volume flow rate greater than 10 L/s.
The pressure range for measuring the volume flow rate in this standard is from 1.5×10-3 Pa to 1×10-7 Pa.
Note: This standard ensures that the measurement of the performance parameters of ion pumps is carried out under the same conditions and with the same methods. Thus, the measurements made by various manufacturers or laboratories are comparable to the data provided by the manufacturers in the samples.