T/ZSA 324-2026 Active Group standards

T/ZSA 324-2026 Technical Specification for O-ring Used in PECVD Equipment

Publish Date: 2026-01-13 Implement Date: 2026-01-14 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ZSA 324-2026

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Video, pulse system equipment

ICS Name: Integration, terminology, standardization, and literature (vocabulary)

Publish Date: 2026-01-13

Implement Date: 2026-01-14

Scope

This standard specifies the basic performance requirements, design parameters, material selection, test methods, and technical requirements for packaging, transportation, and storage of O-ring seals used in plasma chemical vapor deposition (CVD) equipment. This standard applies to various types of seals used in the vacuum system, heating system, high-frequency power supply, and control system of plasma CVD equipment during semiconductor manufacturing. This standard specifies the basic performance requirements, design parameters, material selection, test methods, and technical requirements for packaging, transportation, and storage of O-ring seals used in plasma CVD equipment. This standard applies to various types of seals used in the vacuum system, heating system, high-frequency power supply, and control system of plasma CVD equipment during semiconductor manufacturing.