GB/T 19223-2003
Replaced
T/CESA 1081-2020
Active
Group standards
T/CESA 1081-2020 Semiconductor integrated circuit manufacturing industry, wafers, and green factory evaluation requirements
T/CESA 1081-2020 Semiconductor integrated circuit manufacturing industry, wafers, and green factory evaluation requirements
Price:
$ 20.00
Basic Information
Standard Code:
T/CESA 1081-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Microcircuit
ICS Name:
Integrated Environment and Environmental Protection
Publish Date:
2020-06-20
Implement Date:
2020-06-20
Scope
Main technical content: This standard specifies the principles, methods, indicator systems, requirements, and procedures for evaluating green factories in the semiconductor integrated circuit manufacturing industry (hereinafter referred to as "evaluation"). This standard is applicable to the evaluation of factories that actually produce semiconductor integrated circuit wafers with a wafer size of 8 inches or 12 inches. Manufacturing factories of other types of integrated circuit products can also refer to and use it for reference.
Development Information
Related Standards
HY/T 081-2005
Active
HY/T 081-2005 Technical specification for eco-monitoring of mangrove ecosystem
GB/T 20106-2006
Abolished
GB/T 20106-2006 General principles of stipulating the assessment indicator frame of cleaner production for industries
GB/T 21453-2008
Active
GB/T 21453-2008 General principles of stipulating the guidelines for cleaner production audit in industry sectors
GB/T 21474-2008
Active
GB/T 21474-2008 Guideline for the assessment on the reuse and recycling system of waste electrical and electronic equipment
GB/T 21667-2008
Replaced