GB/T 17865-1999 Active National standards

GB/T 17865-1999 Specification for measuring depth of focus and best focus

Publish Date: 1999-09-13 Implement Date: 2000-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 17865-1999

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Semiconductor integrated circuits

ICS Name: Integrated circuits, microelectronics

Publish Date: 1999-09-13

Implement Date: 2000-06-01

Pages: 12 pages

Development Information

Word Count: 15 Thousand words Pages: 12 pages

Referenced Standards

GB/T 16878-1997 Specification for metrology pattern cells for integrated circuit manufacture SJ/T 10584-1994

Adopt standards

SEMI P25:1994

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