GB/T 3656-1983
Replaced
GB/T 42789-2023
Active
National standards
GB/T 42789-2023 Test method for gloss of silicon wafer
GB/T 42789-2023 Test method for gloss of silicon wafer
Basic Information
Standard Code:
GB/T 42789-2023
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
\nTest methods for the physical properties of metals
ICS Name:
\nMetal material testing
Publish Date:
2023-08-06
Implement Date:
2024-03-01
Pages:
8 pages
Scope
This document describes a method of testing the surface glossiness of silicon wafers using light reflection under geometric conditions of 20°, 60°, or 85°.
This document is suitable for testing the surface glossiness of silicon corrosion wafers, polished wafers, and epitaxial wafers, but it is not suitable for testing silicon wafers with surface patterns.
Development Information
Referenced Standards
JJG 696-2015 Specular Gloss Meters and Gloss Plates
GB/T 9754-1988 Paints and varnishes—Measurement of specular gloss of non-metallic paint films at 20°, 60°and 85°
GB/T 9754-2007 Paints and varnishes—Determination of specular gloss of non-metallic paint films at 20°,60°and 85°
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 9754-2025 Paints and varnishes—Determination of gloss value at 20°、60° and 85°
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced