GB/T 11093-1989
Replaced
GB/T 14264-2009
Replaced
National standards
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
Basic Information
Standard Code:
GB/T 14264-2009
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Semi-metals and semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2009-10-30
Implement Date:
2010-06-01
Pages:
52 pages
Scope
This standard specifies the main terms and definitions related to semiconductor materials, their growth processes, processing, crystal defects, and surface contamination.
This standard applies to elemental and compound semiconductor materials.
Development Information
Replace the following standards
Superseded by the following standards
Referenced Standards
ASTM F1241
SEMI M59
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced