GB/T 27760-2011 Active National standards

GB/T 27760-2011 Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using Si(111) monatomic steps

Publish Date: 2011-12-30 Implement Date: 2012-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 27760-2011

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: The experimental conditions and procedures are summarized here

Publish Date: 2011-12-30

Implement Date: 2012-05-01

Pages: 13 pages

Scope

This standard specifies the measurement method for calibrating the z-axis scale of an atomic force microscope using samples with atomic step heights on the (111) crystal plane of Si.
This standard is applicable to atomic force microscopes operating in atmospheric or vacuum environments, and its z-axis magnification reaches the maximum level, that is, the z-axis displacement is in the nanometer and sub-nanometer range, which is a detection range commonly used by atomic force microscopes to detect the surfaces of semiconductors, optical devices, and other high-tech components.
This standard does not address all possible safety issues. Before applying this standard, it is the user's responsibility to take appropriate safety and health measures and ensure compliance with the conditions stipulated by relevant national regulations.