T/BEA 40001-2022 Active Group standards

T/BEA 40001-2022 The calibration specifications for an induction coupled plasma generator

Publish Date: 2022-01-18 Implement Date: 2022-02-09 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/BEA 40001-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Terminology (principles and coordination and cooperation)

Publish Date: 2022-01-18

Implement Date: 2022-02-09

Scope

Scope: This standard applies to the calibration and periodic calibration of plasma parameters of inductively coupled plasma generators used in vacuum environments, both newly manufactured (or newly purchased) and repaired. Main technical content: 1. Scope 1.1 Topic content: This specification defines the metrological characteristics, calibration conditions, calibration items, calibration methods, and processing of calibration results for inductively coupled plasma generators. 1.2 Applicability: This standard applies to the calibration and periodic calibration of plasma parameters of inductively coupled plasma generators used in vacuum environments, both newly manufactured (or newly purchased) and repaired. 2. Normative references: The provisions of the following documents are incorporated by reference into this standard. For dated references, all subsequent amendment bulletins (excluding errata) or revised versions are not applicable to this standard. However, parties reaching agreements based on this standard are encouraged to investigate whether the latest versions of these documents can be used. For undated references, the latest versions of these documents apply to this standard. JJF 1001-2011 General Metrological Terms and Definitions 3. Terminology definitions: 3.1 Inductively coupled plasma generator: An inductively coupled plasma generator is a gas ionization device that, in a vacuum environment, uses high-frequency power signals loaded on the RF induction coil to generate an alternating magnetic field caused by current, thereby exciting and generating a high-density stable plasma. 3.2 Plasma electron density: The number of electrons in a plasma per unit volume, used to characterize the degree of gas ionization into plasma, expressed in units of electrons per cubic meter (/m3). 3.3 Radial direction ratio: The ratio of the size of the uniform plasma region generated in the vacuum chamber to the radius of the plasma generator along the radial direction. 4.