GB/T 43915-2024 Testing method for nano geometric standard samples

Scope

This document specifies the classification and principles of the test methods for nanogeometric standard samples, as well as the testing equipment, testing environment, testing procedures, and data processing. This document is applicable to the testing of nanowire spacing standard samples with a line spacing of 50 nm to 100 nm, nanowire width standard samples with a line width of 20 nm to 100 nm, nanostep height standard samples with a step height of 10 nm to 100 nm, and nanofilm thickness standard samples with a film thickness of 2 nm to 100 nm.

Development Information

Referenced Standards

Related Standards