GB/T 39516-2020 Active National standards

GB/T 39516-2020 Micro nano standard samples (geometric)

Publish Date: 2020-11-19 Implement Date: 2021-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 39516-2020

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Measuring tools and instruments

ICS Name: Measuring instruments and meters

Publish Date: 2020-11-19

Implement Date: 2021-06-01

Pages: 20 pages

Scope

This standard specifies the terms and definitions, types and basic parameters, requirements, inspection conditions, inspection methods, marking, transportation, and storage of micro-nano standard samples (geometric quantities).
This standard applies to micro-nano line spacing standard samples with a line spacing of 0.05 μm to 10 μm, micro-nano step height standard samples with a step height of 0.01 μm to 100 μm, nano film thickness standard samples with a film thickness of 2 nm to 1,000 nm, and nano line width standard samples with a line width of 25 nm to 1,000 nm.