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GB/T 16595-2019 Active
GB/T 16595-2019 Specification for a universal wafer grid
Abstract
This standard specifies a grid pattern that can be used to quantitatively describe surface defects on circular semiconductor wafers. This standard is applicable to silicon wafers with a nominal diameter of 100 mm to 200 mm, as well as wafers made from other semiconductor materials.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 16595-2019 |
| CCS | Semi-metals and semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2020-02-01 |
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