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GB/T 30453-2013 Active
GB/T 30453-2013 Metallographs collection for original defects of crystalline silicon
Abstract
This standard provides terminology and morphological characteristics of various native defects and closely related induced defects in silicon materials such as silicon polycrystals, silicon single crystals, silicon wafers, and silicon epitaxial wafers. It analyzes the causes of their occurrence and methods of elimination.
This standard is applicable to the inspection of various defects in the production and research of silicon polycrystals, silicon single crystals, silicon wafers, and silicon epitaxial wafers. The production and research of silicon devices and integrated circuits can also refer to this standard.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 30453-2013 |
| CCS | Semi-metals and semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2014-10-01 |
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