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T/GVS 014-2024 Active
T/GVS 014-2024 Low-temperature pump evaluation specification for semiconductor equipment
Abstract
Scope: This document specifies the classification, basic requirements, evaluation requirements, evaluation methods, and evaluation results for the evaluation of low-temperature pumps used in semiconductor equipment. This document is applicable to the evaluation of low-temperature pumps used in semiconductor equipment. Main technical content: It specifies the classification, basic requirements, evaluation requirements, evaluation methods, and evaluation results for the evaluation of low-temperature pumps used in semiconductor equipment.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/GVS 014-2024 |
| CCS | Mechanical |
| ICS | Vacuum technology |
| Implement Date | 2024-08-02 |
Price
$ 20.00
Subtotal
$ 20.00
Tax
$ 0.00
Order Total (incl. tax)
$ 20.00