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T/CI 334-2024 Active
T/CI 334-2024 Design and technical requirements for vibration isolation system for semiconductor equipment
Abstract
This document specifies the design procedure, structural type, and technical requirements for vibration isolation systems used in semiconductor equipment. This document is applicable to the design of vibration isolation systems for semiconductor equipment where the vibration isolator is installed at the bottom. In this document, the instrument itself is considered as a defined load in the system.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/CI 334-2024 |
| Implement Date | 1970-01-01 |
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