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T/CIE 132-2022 Active
T/CIE 132-2022 Test methods for thin film thickness of magnetron sputtering equipment
Abstract
This document specifies the test methods, test principles, test items, test environments, and test procedures for the film accuracy of magnetron sputtering equipment.
This document is applicable to the verification of the film deposition accuracy of magnetron sputtering equipment.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/CIE 132-2022 |
| CCS | Vacuum technology and equipment |
| ICS | Vacuum technology |
| Implement Date | 2022-08-10 |
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