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GB/T 26111-2023 Active
GB/T 26111-2023 Micro-electromechanical system technology—Terms
Abstract
This document defines the terms and definitions related to microelectromechanical systems (MEMS) devices and their production processes. This document is applicable to research, development, evaluation, and applications in the field of MEMS.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 26111-2023 |
| CCS | Micro-components |
| ICS | Other discrete semiconductor devices |
| Implement Date | 2023-09-01 |
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