GB/T 26111-2023 Active National standards

GB/T 26111-2023 Micro-electromechanical system technology—Terms

Publish Date: 2023-05-23 Implement Date: 2023-09-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 26111-2023

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Micro-components

ICS Name: Other discrete semiconductor devices

Publish Date: 2023-05-23

Implement Date: 2023-09-01

Pages: 36 pages

Scope

This document defines the terms and definitions related to microelectromechanical systems (MEMS) devices and their production processes. This document is applicable to research, development, evaluation, and applications in the field of MEMS.

Development Information

Word Count: 72 Thousand words Pages: 36 pages

Replace the following standards

GB/T 26111-2010 Micro-electromechanical system technology—Terms

Adopt standards

IEC 62047-1:2016

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