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GB/T 14604-2009
GB/T 14604-2009 Gas for electronic industry—Oxygen
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of oxygen used in the electronics industry.
This standard applies to gaseous or liquid oxygen extracted by cryogenic methods and electrolysis, as well as oxygen obtained by purification methods. They are mainly used for silicon chemical vapor deposition, as an oxidation source and a reaction agent for producing high-purity water, and in plasma etching and stripping, as well as optical fiber applications.
Molecular formula: O2.
Relative molecular mass: 31.9988 (calculated according to the 2005 International Atomic Mass Table).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 14604-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |
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