GB/T 14604-2009 Replaced National standards

GB/T 14604-2009 Gas for electronic industry—Oxygen

GB/T 14604-2009 Gas for electronic industry—Oxygen

Publish Date: 2009-10-30 Implement Date: 2010-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 14604-2009

Standard Type: National standards

Standard Status: Replaced

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Industrial gases

Publish Date: 2009-10-30

Implement Date: 2010-05-01

Pages: 12 pages

Scope

This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of oxygen used in the electronics industry.
This standard applies to gaseous or liquid oxygen extracted by cryogenic methods and electrolysis, as well as oxygen obtained by purification methods. They are mainly used for silicon chemical vapor deposition, as an oxidation source and a reaction agent for producing high-purity water, and in plasma etching and stripping, as well as optical fiber applications.
Molecular formula: O2.
Relative molecular mass: 31.9988 (calculated according to the 2005 International Atomic Mass Table).

Development Information

Word Count: 17 Thousand words Pages: 12 pages

Replace the following standards

GB/T 14604-1993 Gases for electronic industry—Oxygen

Superseded by the following standards

GB/T 16942-2025 Electronic gas—Bulk gas

Referenced Standards

气瓶安全监察规程压力容器安全技术监察规程压力管道安全管理与监察规定 GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 3863-1995 Industrial oxygen GB/T 3863-2008 Industrial oxygen GB/T 5099-1994 Seamless steel gas cylinders GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB/T 8984-2008 Determination of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method GB/T 8984.1-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 1:Determination of carbon monoxide,carbon dioxide and mathane in the gases—Gas chromatographic method GB/T 8984.2-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 2:Determination of total content of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method GB/T 8984.3-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 3:Determination of total hydrocarbon in gases—Flame ionization method GB 14194-1993 Rules for filling of permanent gas cylinders GB/T 14194-2006 Rules for filling of permanent gas cylinders GB/T 14194-2017 Rules for filling of compressed gas cylinders GB/T 14600-1993 Gases for electronic industry—Nitrous oxide GB/T 14600-2009 Gas for electronic industry—Nitrous oxide GB 16912-1997 Safety technical regulation for oxygen and relative gases GB 16912-2008 Safety technical regulation for oxygen and relative gases produced with cryogenic method JB/T 6898-2015 JBT 6898-2015 Low Temperature Liquid Storage and Transportation Equipment Safety Rules of Use JB/T 5905-1992 Vacuum multilayer insulation low-temperature liquid container JB 6898-1997 Low-temperature liquid transportation equipment safety rules JB/T 5905-2000 Cryogenic liquid containers insulated with evacuated multilayer insulations JB/T 6897-2000 Low-temperature liquid transportation vehicle GB/T 14600-2025 Electronic gas—Nitrous oxide GB/T 8984-2025 Gas analysis—Determination of the contents of trace carbon monoxide, carbon dioxide and hydrocarbon in gases—Gas chromatography with flame ionization detector GB/T 3863-2025 Industrial oxygen

Related Standards

GB 4962-1985 Replaced

GB 4962-1985 Technical safety regulation for gaseous hydrogen use

Publish Date: 1985-03-01

GB/T 8981-1988 Replaced

GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method

Publish Date: 1988-03-15

GB/T 10627-1989 Replaced

GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods

Publish Date: 1989-03-01

GB/T 10628-1989 Replaced

GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods

Publish Date: 1989-03-22

GB 13548-1992 Replaced

GB 13548-1992 General principle of safety assessment for phosgene and its products plant

Publish Date: 1992-06-29

GB 13591-1992 Replaced

GB 13591-1992 Rules for the filling of dissolved acetylene

Publish Date: 1992-08-05