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GB/T 6618-2009 Active
GB/T 6618-2009 Test method for thickness and total thickness variation of silicon slices
Abstract
This standard specifies the discrete and scanning measurement methods for the thickness and total thickness variation of silicon single-crystal cutting slices, grinding slices, polishing slices, and epitaxial slices (referred to as silicon slices). This standard is applicable to the measurement of the thickness and total thickness variation of silicon slices that conform to the dimensions specified in GB/T 12964, GB/T 12965, and GB/T 14139. Where the testing instruments permit, this standard can also be used for the measurement of the thickness and total thickness variation of silicon slices of other specifications.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 6618-2009 |
| CCS | Semi-metals and semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2010-06-01 |
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