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GB/T 14140-2009
GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer
Abstract
This standard specifies the method of measuring the diameter of silicon wafers using an optical projector. This standard is applicable to measuring the diameter of circular silicon wafers, with a maximum diameter of 300 mm. This standard is not applicable to measuring the non-circularity of silicon wafers.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 14140-2009 |
| CCS | Element semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2010-06-01 |
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