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GB/T 6624-2009 Active
GB/T 6624-2009 Standard method for measuring the surface quality of polished silicon slices by visual inspection
Abstract
This standard specifies a method for visually inspecting the surface quality of monocrystalline polished wafers (hereinafter referred to as polished wafers) under certain lighting conditions.
This standard is applicable to the surface quality inspection of silicon polished wafers. The visual inspection of the surface quality of epitaxial wafers can also refer to this method for reference.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 6624-2009 |
| CCS | Semi-metals and semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2010-06-01 |
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