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GB/T 30868-2014
GB/T 30868-2014 Test method for measuring micropipe density of monocrystalline silicon carbide wafers—Chemically etching
Abstract
This standard specifies the method of determining the density of silicon carbide single-crystal microtubes using the corrosion method with molten potassium hydroxide.
This standard is applicable to the determination of the density of silicon carbide single-crystal microtubes.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 30868-2014 |
| CCS | Compound semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2015-02-01 |
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