T/EJCCCSE 532-2025 Active Group standards

T/EJCCCSE 532-2025 Electron-grade silane gas

Publish Date: 2025-08-21 Implement Date: 2025-09-20 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/EJCCCSE 532-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial gases

Publish Date: 2025-08-21

Implement Date: 2025-09-20

Scope

This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of electronic-grade silane gas. This document is applicable to electronic-grade silane gas used in processes such as epitaxial deposition of polycrystalline and monocrystalline silicon, low-temperature chemical vapor deposition of silicon dioxide, and deposition of amorphous silicon films in the electronics industry.

Development Information

Related Standards

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