T/CNIA 0118-2021 Determination of Trace Impurity Element Content in High-purity Hydrofluoric Acid for Electronic Industry Using Inductively Coupled Plasma Mass Spectroscopy (ICP-MS)
T/CNIA 0118-2021 Determination of Trace Impurity Element Content in High-purity Hydrofluoric Acid for Electronic Industry Using Inductively Coupled Plasma Mass Spectroscopy (ICP-MS)
Basic Information
Scope
Main technical content: This document specifies a method for determining the content of impurity elements (aluminum, antimony, arsenic, barium, boron, cadmium, calcium, chromium, copper, iron, lead, lithium, magnesium, manganese, nickel, potassium, sodium, tin, titanium, vanadium, and zinc) in high-purity hydrofluoric acid used in the electronics industry by inductively coupled plasma mass spectrometry. This document is applicable to the determination of trace impurity elements in high-purity hydrofluoric acid used in the electronics industry, with a measurement range of 0.001μg/kg to 10.000μg/kg. The standard working curve method is suitable for determining the content of each trace impurity element exceeding 0.100μg/kg; the standard addition method is suitable for determining the content of each trace impurity element less than or equal to 0.100μg/kg.