T/SHMHZQ 021-2023 Semiconductor vacuum valve technical requirements specification
T/SHMHZQ 021-2023 Semiconductor vacuum valve technical requirements specification
Basic Information
Scope
Scope: This standard specifies the technical requirements, forms, and basic parameters of semiconductor vacuum valves, as well as requirements for marking, packaging, transportation, and storage. This document applies to the technical requirements of vacuum valves used in photovoltaic, integrated circuits, compound semiconductors, and other equipment. Main technical content: Foreword 1 ; Scope 2; Normative reference documents 3; Terms and definitions 4; Classification and models 5; Technical requirements 5.1 ; Structural requirements 5.2; Material requirements 5.3; Performance requirements 5.4; Design requirements 5.5; Manufacturing requirements 5.6; Inspection requirements 5.7; Use requirements 5.8; Test methods 5.9; Inspection rules 6. Forms and basic parameters 6.1 ; Drive type 6.2; Model representation method 6.3; Basic parameters and connection dimensions 7. Marking, packaging, transportation, and storage 7.1 ; Marking 7.2; Packaging 7.3; Transportation 7.4; Storage 8. Requirements and evaluation