GB/T 4855-1984
Abolished
T/EDASQUARE 009-2024
Active
Group standards
Output Data Format Specification for the Checking Software of OPC Results after T/EDASQUARE 009-2024
T/EDASQUARE 009-2024 Software output data format specification for post-OPC result verification
Price:
$ 20.00
Basic Information
Standard Code:
T/EDASQUARE 009-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Integrated circuits, microelectronics
Publish Date:
2024-09-21
Implement Date:
2024-12-22
Scope
Main technical content: This document specifies the output data format for modeling OPC results simulation and verification software. This document is applicable to the field of wafer manufacturing, including wafer manufacturing plants (covering the manufacture of memory and logic chips) themselves and corresponding support units for computational lithography software. This standard is applicable to all process levels starting from the 0.18um technology node, as well as subsequent more advanced process nodes. As the technology node advances, the standard needs to cover more technical elements.
Development Information
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