GB 4962-1985
Replaced
T/ICMTIA ESG0013-2022
Active
Group standards
T/ICMTIA ESG0013-2022 The mixed gas used for integrated circuits consisting of 3.5% argon, 10 ppm xenon, and neon
T/ICMTIA ESG0013-2022 The mixed gas used for integrated circuits consisting of 3.5% argon, 10 ppm xenon, and neon
Price:
$ 29.00
Basic Information
Standard Code:
T/ICMTIA ESG0013-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial gases and chemical gases
ICS Name:
Industrial gases
Publish Date:
2022-04-08
Implement Date:
2022-05-01
Scope
Main technical content: This document specifies the technical requirements, test methods, and requirements for marking, packaging, transportation, and storage of the 3.5% argon/10ppm xenon/neon mixed gas used in integrated circuits. This document is applicable to the 3.5% argon/10ppm xenon/neon mixed gas used in integrated circuits. For argon/xenon/neon mixed gases with other component ratios, reference can be made to this document for implementation.
Development Information
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced