T/ICMTIA ESG0016-2022 Active Group standards

T/ICMTIA ESG0016-2022 Gas used for integrated circuits: Ethylsilane

Publish Date: 2022-05-10 Implement Date: 2022-05-31 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ICMTIA ESG0016-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Terminology (principles and coordination and cooperation)

Publish Date: 2022-05-10

Implement Date: 2022-05-31

Scope

Main technical content: This document specifies the technical requirements, testing methods, marking, packaging, and safety requirements for ethylsilane used in integrated circuits. This document is applicable to ethylsilane prepared by the magnesium silicide method (XCMG method). It is mainly used in the vapor deposition process of silicon oxide films, silicon nitride films, and polycrystalline silicon films in the semiconductor industry. Other processes shall refer to this document for implementation.