T/CIET 1581-2025 Active Group standards

T/CIET 1581-2025 Universal technical requirements for wafer handling robots

Publish Date: 2025-08-11 Implement Date: 2025-08-11 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIET 1581-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial robots and manipulators

Publish Date: 2025-08-11

Implement Date: 2025-08-11

Scope

This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of wafer handling robots. This document is applicable to wafer handling robots in both atmospheric and vacuum environments. This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of wafer handling robots. This document is applicable to wafer handling robots in both atmospheric and vacuum environments.