T/CHBAS 54-2024 Active Group standards

T/CHBAS 54-2024 Nitrogen trifluoride mixed gas used in the electronics industry

Publish Date: 2024-04-19 Implement Date: 2024-04-19 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CHBAS 54-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial gases

Publish Date: 2024-04-19

Implement Date: 2024-04-19

Scope

Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and safety requirements for nitrogen trifluoride mixtures used in the electronics industry (hereinafter referred to as nitrogen trifluoride mixtures). This document is applicable to the semiconductor electronics industry. The balance gas in the nitrogen trifluoride mixtures in this document is usually helium, argon, and nitrogen, or other balance gases that do not chemically react with nitrogen trifluoride mixtures and do not affect the reaction process.

Development Information

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