GB 4962-1985
Replaced
T/DLSHXH 008-2022
Active
Group standards
T/DLSHXH 008-2022 Di(diethylamino)silane is an example of electronic gas
T/DLSHXH 008-2022 Di(diethylamino)silane is an example of electronic gas
Price:
$ 20.00
Basic Information
Standard Code:
T/DLSHXH 008-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Industrial gases
Publish Date:
2022-09-30
Implement Date:
2022-10-20
Scope
Main technical content: This standard specifies the technical requirements, inspection rules, test methods, marking, packaging, storage and transportation, and safety information for diethylamino silane. This standard applies to electronic-grade diethylamino silane obtained by refining and filtering industrial-grade diethylamino silane as a raw material. This product is mainly used as a precursor for preparing low-temperature SiO2 films and silicon-based high-dielectric thin films.
Development Information
Related Standards
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GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
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GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
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GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced