GB/T 8567-1988
Replaced
T/WHAS 062-2023
Active
Group standards
T/WHAS 062-2023 Guidelines for designing optical proximity correction software for integrated circuits
T/WHAS 062-2023 Guidelines for designing optical proximity correction software for integrated circuits
Price:
$ 20.00
Basic Information
Standard Code:
T/WHAS 062-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Software development and system files
Publish Date:
2023-12-26
Implement Date:
2024-01-10
Scope
Main technical content: This document specifies the design principles, functional modules, and design requirements for optical proximity effect correction software used in integrated circuits. This document is applicable to the development of the functional architecture of optical proximity effect correction software for integrated circuits, and related fields that use dry and immersion lithography techniques can refer to and use it as needed.
Development Information
Related Standards
GB/T 13400.1-1992
Replaced
GB/T 13400.1-1992 Terms used in network planning techniques
GB/T 13400.2-1992
Replaced
GB/T 13400.2-1992 General rule for representation on network planning techniques
GB/T 13400.3-1992
Replaced
GB/T 13400.3-1992 General program of network planning techniques used in project management
GB/T 13502-1992
Active
GB/T 13502-1992 Information processing—Program constructs and conventions for their representation
GB/T 14079-1993
Abolished