GB 4962-1985
Replaced
T/CASME 272-2022
Active
Group standards
T/CASME 272-2022 Highly pure hydrogen chloride gas used in the electronics industry
T/CASME 272-2022 Highly pure hydrogen chloride gas used in the electronics industry
Price:
$ 20.00
Basic Information
Standard Code:
T/CASME 272-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Chemical industry
ICS Name:
Industrial gases
Publish Date:
2022-12-29
Implement Date:
2022-12-31
Scope
Scope: This document is applicable to gases purified from hydrogen chloride produced by industrial synthesis or from other industrial sources of hydrogen chloride, which are mainly used in the microelectronics industry for vapor polishing, epitaxy, and etching processes. They can also be used in fields such as hard alloy processing, glass surface treatment, the manufacture of pharmaceutical intermediates and fine chemicals, and scientific research. Main technical content: This document specifies the classification, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and safety warnings for high-purity hydrogen chloride gas used in the electronics industry.
Development Information
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced