GB 4962-1985
Replaced
T/CCGA 30003-2019
Active
Group standards
T/CCGA 30003-2019 Ultra-Pure Nitrogen Trifluoride
T/CCGA 30003-2019
Price:
$ 20.00
Basic Information
Standard Code:
T/CCGA 30003-2019
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Other chemical products
ICS Name:
Industrial gases
Publish Date:
2019-10-29
Implement Date:
2020-01-29
Scope
Main technical content: This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, transportation, storage, and safety of bottled ultra-pure nitrogen trifluoride. This standard applies to electrolytic synthesized crude nitrogen trifluoride and ultra-pure nitrogen trifluoride produced by distillation purification. It is mainly used as an etching agent in plasma processing and a cleaning agent in chemical vapor deposition in the electronics industry.
Development Information
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