T/CITS 402-2025 Metal Film Capacitive Vacuum Gauge
T/CITS 402-2025 Metal film capacitive vacuum gauge
Basic Information
Scope
Scope: This document specifies the abbreviations, general requirements, technical requirements, test methods, inspection rules, and markings, packaging, transportation, and storage of metal film capacitive vacuum gauges. This document applies to the design, production, inspection, and use of metal film capacitive vacuum gauges (hereinafter referred to as "vacuum gauges"). Main technical content: This document specifies the abbreviations, general requirements, technical requirements, test methods, inspection rules, and markings, packaging, transportation, and storage of metal film capacitive vacuum gauges. This document applies to the design, production, inspection, and use of metal film capacitive vacuum gauges (hereinafter referred to as "vacuum gauges").