T/QGCML 4860-2025 Active Group standards

T/QGCML 4860-2025 Maskless UV Lithography Machine

T/QGCML 4860-2025 Maskless direct write lithography machine

Publish Date: 2025-05-22 Implement Date: 2025-06-06 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/QGCML 4860-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Optoelectronics, laser equipment

Publish Date: 2025-05-22

Implement Date: 2025-06-06

Scope

Main technical content: This document specifies the term definitions, product classification and structure, working environment, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of maskless UV lithography machines. This document is applicable to the design, R&D, production, and inspection of maskless UV lithography machines.