GB/T 14264-1993
Replaced
T/CIET 1151-2025
Active
Group standards
Technical Specifications for Ion Implantation Equipment Used in Chip Manufacturing, T/CIET 1151-2025
T/CIET 1151-2025 Technical specification for ion implanter used in chip manufacturing
Price:
$ 20.00
Basic Information
Standard Code:
T/CIET 1151-2025
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Integrated Components of Semiconductor Devices
Publish Date:
2025-04-09
Implement Date:
2025-04-09
Scope
Scope: This document specifies the product classification, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of ion implantation equipment used in chip manufacturing. This document applies to ion implantation equipment used in chip manufacturing. Main technical content: This document specifies the product classification, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of ion implantation equipment used in chip manufacturing. This document applies to ion implantation equipment used in chip manufacturing.
Development Information
Related Standards
GB/T 14844-1993
Replaced
GB/T 14844-1993 Designations of semiconductor materials
GB/T 17573-1998
Active
GB/T 17573-1998 Semiconductor devices Discrete devices and integrated circuits Part 1:General
GB/T 12560-1999
Active
GB/T 12560-1999 Semiconductor devices Sectional specification for discrete devices
GB/T 11499-2001
Active
GB/T 11499-2001 Letter symbols for discrete semiconductor devices
GB/T 20521-2006
Active