T/DLSHXH 007-2022 Active Group standards

T/DLSHXH 007-2022 Electronic specialty gas trifluoromethane iodine

Publish Date: 2022-09-30 Implement Date: 2022-10-20 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/DLSHXH 007-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Industrial gases

Publish Date: 2022-09-30

Implement Date: 2022-10-20

Scope

Main technical content: This standard specifies the technical requirements, test methods, inspection rules, marking, packaging, storage and transportation, and safety information requirements for trifluoromethyl iodide. This standard is applicable to trifluoromethyl iodide products obtained by distillation and purification from industrial-grade trifluoromethyl iodide. This product is mainly used for cleaning semiconductor gas deposition processing chambers or plasma etching

Development Information

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