DZ/T 0101.12-1994
Active
T/CEMIA 041-2024
Active
Group standards
T/CEMIA 041-2024 Silicon carbide ring for integrated circuit etching equipment
T/CEMIA 041-2024 Silicon carbide ring for integrated circuit etching equipment
Price:
$ 38.00
Basic Information
Standard Code:
T/CEMIA 041-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
1970-01-01
Implement Date:
1970-01-01
Scope
This document specifies the terms and definitions, product classification, technical requirements, inspection methods, inspection rules, marking, packaging, transportation, and storage of quartz rings for integrated circuit etching equipment. This document is applicable to quartz rings for integrated circuit etching equipment.
Development Information
Related Standards
JJG 204-1980
Active
JJG 204-1980 Meteorological Ventilation Psychrometer
SC 53-1980
Active
SC 53-1980 Transfer blade hydraulic steering gear repair quality standard
DZ 4-1981
Replaced
\nDZ 4-1981 Method for Compiling Product Models of Geological Instrumentation Equipment
SC 69-1982
Active
SC 69-1982 ZSS-12 Flash-type seawater desalination production device technical specifications
SC 72-1982
Active