T/CEMIA 043-2024 Active Group standards

T/CEMIA 043-2024 Quartz outer tubes for integrated circuit diffusion equipment

Publish Date: 2024-11-05 Implement Date: 2025-01-05 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CEMIA 043-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Quartz glass

ICS Name: \nGlass products

Publish Date: 2024-11-05

Implement Date: 2025-01-05

Pages: 20 pages

Scope

This document specifies the terms and definitions, classification and marking, materials, technical requirements, test methods, inspection rules, and product identification, packaging, transportation, and storage for quartz outer tubes used in integrated circuit diffusion equipment.
This document is applicable to quartz outer tubes used in integrated circuit manufacturing processes with diameters of 12 inches or less.
Note: 1 inch = 25.4 mm.