T/NMSP T/NMSP.MZB04.04-2024
Active
T/CHBAS 33-2023
Active
Group standards
T/CHBAS 33-2023 Mixed gas for integrated circuits, 4.5% hydrogen chloride/0.9% hydrogen/neon
T/CHBAS 33-2023 Mixed gas for integrated circuits, 4.5% hydrogen chloride/0.9% hydrogen/neon
Price:
$ 20.00
Basic Information
Standard Code:
T/CHBAS 33-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Other
Publish Date:
2023-07-27
Implement Date:
2023-07-27
Scope
Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, labeling, packaging, transportation, storage, and safety requirements for the mixed gas of 4.5% hydrogen chloride/0.9% hydrogen/neon used in integrated circuits. This document is applicable to the mixed gas of 4.5% hydrogen chloride/0.9% hydrogen/neon (hereinafter referred to as 4.5% hydrogen chloride/0.9% hydrogen/neon) used in integrated circuits. The mixed gas of hydrogen chloride/hydrogen/neon with other component proportions may be implemented in accordance with this document.
Development Information
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